Biography or a Short Self-introduction
Osaka University, Electronics
TKL SVP, Development Division
Name of Forum:
Innovation in Semiconductor Manufacturing with Intelligent Control
With the introduction of EUV technology into the mass production, Semiconductor Manufacturing Technology succeeded to step up to another stage. At the same time, we are facing the continuous challenge to maintain the productivity or yield with highly complex process technology. Historically engineers from both of semiconductor manufacturing companies and equipment suppliers solved issue with their longtime experience and deep process and equipment knowledge.
On the other hand, AI or machine learning technology starts showing the capability to replace or support the human engineers in variety of industry. The challenge and future possibility to introduce those intelligent technology into Semiconductor Manufacturing will be discussed in this talk.
Beijing Internation Seminar on Micro-Electronics & IC WORLD Conference
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